| 摘要 |
<p>An ultrasonic motor has a stator (100) having a piezoelectric member (102) vibrated by a drive signal, and an elastic member for generating a traveling vibration wave in a drive surface (P1) thereof upon vibration of the piezoelectric member, a rotor (20) which is urged against the drive surface of the elastic member and is driven by the generated traveling vibration wave, a support member (30, 33, 36, 300, 303, 306, 309, 313) integrally molded on the elastic member, and a fixing member for holding the support member. In the ultrasonic motor, one end face (P3) of the support member is formed at the same level as the drive surface (P1) or the junction surface (P2) of the elastic member, an electrode (13) of the piezoelectric member is grounded through the support member, a plurality of holes (312, 316) are regularly formed in the circumferential direction of the support member, or the support member is fixed to the fixing member by an adhesive (400), thereby improving drive efficiency.</p> |
