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发明名称
CLEANING DEVICE FOR SEMICONDUCTOR WAFER
摘要
申请公布号
JPH02205025(A)
申请公布日期
1990.08.14
申请号
JP19890024211
申请日期
1989.02.02
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
MATSUMOTO MICHIICHI
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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