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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02205018(A)
申请公布日期
1990.08.14
申请号
JP19890023844
申请日期
1989.02.03
申请人
HITACHI LTD
发明人
SUZUKI TADASHI;KASHU NOBUYOSHI;GOSHIMA HIDEKAZU;OYU SHIZUNORI;TAMURA MASAO
分类号
H01L21/265;H01L21/74
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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