MANUFACTURE OF MULTILAYER INTERCONNECTION STRUCTURE

摘要

Prodn. of insulating layer with flat plane comprises the steps of: coating of the soln. of silylated low alkyl polysilsesquinoxane of formula (I) onto the circuit board having step difference of height; drying the solvent; melting the low alkyl polysilsesquinoxane to form a flat polymer plane; and curing the polymer. In the formula, R is methyl or ethyl; n= 50-2000. Pref. the silylated low alkyl polysilsesquinoxane is methyl polysilsesquinoxane having trimethysill terminating gp. and its ave. Mw is 7.0 x 103-2.7 x 105.