发明名称 |
TUNNELLING SCANNING MICROSCOPE |
摘要 |
A tunnelling scanning microscope comprising a probe (8) having a fine conductive tip; means (6,7) for positioning the tip of said probe (8) sufficiently close to a surface of a sample (5) to be investigated so that tunnelling current flows; means (13) for scanning across said sample surface with the tip of said probe (8); means (14) for automatically controlling the distance between the tip of said probe (8) and said sample surface during scanning in response to measured tunnel current; and display means for producing an image of the configuration of the sample surface characterised in that a light source (9) is provided for irradiating the sample surface. |
申请公布号 |
EP0296871(A3) |
申请公布日期 |
1990.08.08 |
申请号 |
EP19880305773 |
申请日期 |
1988.06.24 |
申请人 |
SEIKO INSTRUMENTS INC. |
发明人 |
SAKUHARA, TOSHIHIKO;UCHIYAMA, TETSUO;SAKAI, FUMIKI |
分类号 |
G01N23/00;G01B7/34;G01N27/00;G01N37/00;G01Q10/06;G01Q30/04;G01Q60/10;G01Q60/40;H01J37/26;H01J37/28;(IPC1-7):G01N27/00 |
主分类号 |
G01N23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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