发明名称 TUNNELLING SCANNING MICROSCOPE
摘要 A tunnelling scanning microscope comprising a probe (8) having a fine conductive tip; means (6,7) for positioning the tip of said probe (8) sufficiently close to a surface of a sample (5) to be investigated so that tunnelling current flows; means (13) for scanning across said sample surface with the tip of said probe (8); means (14) for automatically controlling the distance between the tip of said probe (8) and said sample surface during scanning in response to measured tunnel current; and display means for producing an image of the configuration of the sample surface characterised in that a light source (9) is provided for irradiating the sample surface.
申请公布号 EP0296871(A3) 申请公布日期 1990.08.08
申请号 EP19880305773 申请日期 1988.06.24
申请人 SEIKO INSTRUMENTS INC. 发明人 SAKUHARA, TOSHIHIKO;UCHIYAMA, TETSUO;SAKAI, FUMIKI
分类号 G01N23/00;G01B7/34;G01N27/00;G01N37/00;G01Q10/06;G01Q30/04;G01Q60/10;G01Q60/40;H01J37/26;H01J37/28;(IPC1-7):G01N27/00 主分类号 G01N23/00
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