| 摘要 |
PURPOSE:To inspect a surface fault without moving parts to be inspected, by making a scanning pattern that scanning light draws similar to the outward shape of the part to be inspected, and performing three-dimensional scanning while varying the size with time. CONSTITUTION:Driving mirrors 6a and 6b are arranged while having driving axes set at right angles to each other, and are driven around their axes respectively. Incident light is scanned circularly by the driving mirrors 6a and 6b and reflected by a cylindrical internal surface reflecting mirror 5 to scan on a body 1 to be inspected in a circumferential direction. The driving mirrors 6a and 6b are driven by multiplying the input waveform by a factor K through AGC circuits 7a and 7b and then inputting the results to driving circuits 8a and 8b. When the coefficient K is varied as shown in the graph by a gain control signal generator 9, maximum angles of oscillation of the driving mirrors 6a and 6b vary and the diameter of the circularly scanned pattern varies similarly. As a result, while the body 1 to be inspected is fixed, the circumferential scanning light 4 is moved in an axial direction for three-dimensional scanning. |
