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发明名称
REMOVAL OF FILM
摘要
申请公布号
JPH02194527(A)
申请公布日期
1990.08.01
申请号
JP19890013382
申请日期
1989.01.23
申请人
DAN SANGYO KK;SAKUSHIIDE:KK;TOSHIBA CERAMICS CO LTD
发明人
YANAGISAWA KAZUHISA;IMAI TOSHIO;NOMURA HISAO
分类号
H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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