DENSHISHASHINYOHIKARIJUYOBUZAI

摘要

PURPOSE:To enable image formation using a monochromatic coherent light by arranging an a-SiGe layer photoconductive a-Si layer on a substrate in this order from it and incorporating a conductivity governing substance in at least one of them in a concn. distribution nonuniform in the layer thickness direction. CONSTITUTION:The first layer 1002 contg. a-SiGe and the second photoconductive layer 1003 contg. a-Si are formed in this order on the substrate 1001 having on the surface a large number of protuberances formed by overlaying subsidiary peaks on main peaks on the section obtained by cutting the substrate 1001 at the prescribed position to obtain a light receiving layer 1000 having multilayer structure. At least one of the layers 1002, 1003 contains the conductivity governing substance in a concn. distribution nonuniform in the layer thickness direction in this layer. Such a surface of the substrate 1001 can enhance adhesion to the layer 1000, and prevent light interference effect. The incorporation of the conductivity governing substance gives desirable conduction characteristics to the layers 1002 and/or 1003.