Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method

摘要

A controller measures positional information of a stage within an XY plane using three encoders which at least include one each of an X encoder and a Y encoder of an encoder system, and the stage is driven in the XY plane, based on measurement results of the positional information and positional information (p1, q1), (p2, q2), and (p3, q3) in a surface parallel to the XY plane of a head (an encoder) used for measurement of the positional information. Accordingly, it becomes possible to control the movement of the stage with good precision, while switching the head (the encoder) used for control during the movement of the stage using the encoder system which includes a plurality of heads.

主权项

1. An exposure method of exposing an object with an illumination light via a projection optical system and a liquid, the method comprising:
forming a liquid immersion area under the projection optical system with the liquid by a nozzle unit provided to surround an lower end part of the projection optical system; placing the object to face an alignment system that is arranged away from the projection optical system, by a stage on which the object is mounted, so that a mark of the object is detected by the alignment system; placing the object to face the projection optical system by the stage so that the object is exposed with the illumination light via the projection optical system and the liquid of the liquid immersion area; in an encoder system having one of a grating section and a head provided at the stage and the other of the grating section and the head provided on an outer side of the nozzle unit with respect to the projection optical system, by a plurality of the heads that face the grating section, measuring positional information of the stage; and controlling a movement of the stage while compensating for a measurement error of the encoder system that occurs due to the head, based on measurement information of the encoder system, wherein in each of a detection operation of the mark and an exposure operation of the object, the positional information of the stage is measured by the encoder system, and by a movement of the stage, one of the plurality of heads used in the measurement is switched to another head, and based on the positional information measured by the plurality of heads used before the switching, correction information to control the movement of the stage using the another head is obtained.