SENSOR AND ITS MANUFACTURING METHOD

摘要

Gas sensor comprises (a) at least three planar metal outer electrodes; (b) a wire metal heat-generating member connected to and supported by two of electrodes (a); (c) a heat resistant insulating coating formed on (b); (d) a gas-sensitive layer formed on (c), electrical characteristics of layer (d) changing with changes in an environmental gas to be sensed; and (e) at least one detecting electrode formed at a position selected from coating (c) and layer (d), and the electrode (e) is connected to layer (d) and is directly connected to the remaining-electrode (a). Member (b) is made of Ni-Cr alloy or Fe-Cr-Al alloy. Sensor has reduced power consumption.