APPARATUS FOR GROWING FILM AND METHOD FOR GROWING,申请号JP19890009673-传众专利搜索

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发明名称	APPARATUS FOR GROWING FILM AND METHOD FOR GROWING
摘要
申请公布号	JPH02192489(A)	申请公布日期	1990.07.30
申请号	JP19890009673	申请日期	1989.01.20
申请人	NIPPON TELEGR & TELEPH CORP <NTT>	发明人	KONDO NAOTO;NANISHI YASUYUKI
分类号	C30B25/02;H01L21/205	主分类号	C30B25/02
代理机构		代理人
主权项
地址

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