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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH02192168(A)
申请公布日期
1990.07.27
申请号
JP19890009736
申请日期
1989.01.20
申请人
HITACHI LTD
发明人
MURATA JUN
分类号
H01L21/336;H01L21/8234;H01L27/088;H01L29/78
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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