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经营范围
发明名称
PROCESS AND COMPOSITION FOR DRYING OF GASEOUS HYDROGEN HALIDES
摘要
申请公布号
EP0283965(A3)
申请公布日期
1990.07.25
申请号
EP19880104393
申请日期
1988.03.18
申请人
ADVANCED TECHNOLOGY MATERIALS, INC.
发明人
TOM, GLENN M.;BROWN, DUNCAN W.
分类号
B01D53/28;B01J20/02;B01J20/22;C01B7/00;C01B7/07;C01B7/09;C01B7/13;C01B7/19;C01G1/06;(IPC1-7):C01F7/00;B01D53/26
主分类号
B01D53/28
代理机构
代理人
主权项
地址
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