METHOD AND APPARATUS FOR INSPECTING SAMPLE BY X-RAY FLUORESCENT ANALYSIS

摘要

PURPOSE: To provide an apparatus for determining and adjusting the incident angle accurately by reflecting a first order X-ray radiation from an X-ray source on a carrier under conditions of total reflection. CONSTITUTION: A first order X-ray radiation 17 from an X-ray source 16 is reflected on a carrier 11 under conditions of total reflection. The surface of a sample carrier 24 is shifted, at a specified interval, in parallel with a reference plane 22 for reflecting the first order X-ray radiation 17 under conditions of total reflection. Radiation path of the first order X-ray radiation 17 is then adjusted with respect to the reference plane 22 and the radiation spectrum of second order radiation 18 from a sample placed on the surface of sample carrier 24 is observed by means of a radiation detector 12. Maximum intensity of the second order radiation 18 is detected when the first order X-ray radiation 17 has a specified quantity of energy and then it is related to a known reference angle.