METHOD FOR PURIFYING GASEOUS NITROGEN TRIFLUORIDE,申请号JP19890275049-传众专利搜索

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发明名称	METHOD FOR PURIFYING GASEOUS NITROGEN TRIFLUORIDE
摘要
申请公布号	JPH02188414(A)	申请公布日期	1990.07.24
申请号	JP19890275049	申请日期	1989.10.24
申请人	MITSUI TOATSU CHEM INC	发明人	ARITSUKA MAKOTO;IWANAGA TOKUYUKI
分类号	C01B21/083	主分类号	C01B21/083
代理机构		代理人
主权项
地址

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