| 摘要 |
PURPOSE:To perform positioning accurately without increasing the weight of a carrier, in a contactless levitation carrier to be employed in a clean room, by employing a LIM for movement between stations and employing an LDM for positioning at a station. CONSTITUTION:A levitation floating carrier 10 is normally moved through a moving linear motor 30 between stations 20. When the carrier 10 stops at a station 20, it is roughly positioned at the stopping position in the station 20 through the moving linear motor 30 then it is positioned accurately through a positioning linear motor 50. The positioning linear motor 50 performs accurate positioning upto the position detecting resolution of a position sensor 71 when it is subjected to servo control through a controller 81 based on signals fed from a speed sensor 61 and a position sensor 71. |
