| 摘要 |
PURPOSE:To pierce holes at plural working points at the same time by dividing a laser beam into the parallel N streaks with N pieces of beam splitters, piercing the holes at N positions of the working points at the same time, superposing visible radiation flux and the working points are irradiated with the resultant flux. CONSTITUTION:The laser beam for working projected toward a beam axis 14 with a laser beam generator 10 is divided into the beam axes 15A-15D with the beam splitters 20A-20D and they are condensed with condensed lenses 22A-22D and print plates 80A-80D are pierced. The visible laser beam generator 11 projects the visible radiation and this is introduced to the beam axis 14 with a shifting mirror 12. They to the working points on the print plates 80A-80D following the same course as the laser beam for working and irregularly reflect and come to a TV camera 33 with reflection mirrors 30A-30D having hole through condensed lenses 23A-23D, so as to aim and adjust to the working points. Plural positions of the working points can be pierced at the same time at high accuracy with only one piece of the laser beam generator for working. |
