| 摘要 |
PURPOSE: To improve resolution and stability by constituting a driver connected to a housing at a specific position of three parts including an extendable part and shaft parts which can be clamped at both sides of the extendable part and by supplying voltage to the three respective parts for performing respective operation. CONSTITUTION: A motor 24 for operating a shaft 22 with a sample holder attached to a front end 21 in parallel comprises a clamp parts 1, 3 and an extension 2 and is connected to a housing surrounding the motor 24 with a distance between the parts 1, 2 as a ring 36. Further, electrodes 27, 31 and an electrode 28 are respectively attached to the outside in a radial direction of the parts 1, 3 and the part 2, a common internal electrode 34 is provided inside in a radial direction of the parts 1, 2, 3 and a spacer is provided inside the electrode 34 at the parts 1, 3 positions to be in contact with the shaft 22. Voltage is applied to the electrode 27 or 31 to cause the part 1 or 3 to hold the shaft 22, while voltage is applied to the electrode 29 to cause the part 2 to extend to the right. Thus a fluctuation applied to the shaft 22 when the parts 1, 3 operate can be removed. |
