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发明名称
SUBSTRATE INSPECTION DEVICE USING ELECTRON BEAM
摘要
申请公布号
JPH02185054(A)
申请公布日期
1990.07.19
申请号
JP19890005155
申请日期
1989.01.11
申请人
NEC CORP
发明人
UKITA AKIO
分类号
G01R31/02;G01R31/302;H01L21/66
主分类号
G01R31/02
代理机构
代理人
主权项
地址
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