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发明名称
MANUFACTURE OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH02177321(A)
申请公布日期
1990.07.10
申请号
JP19880278744
申请日期
1988.11.04
申请人
CHIYOU LSI GIJUTSU KENKYU KUMIAI
发明人
TSUYA HIDEKI;TANNO YUKINOBU
分类号
H01L21/205;H01L21/322
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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