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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02177347(A)
申请公布日期
1990.07.10
申请号
JP19880331219
申请日期
1988.12.27
申请人
SHARP CORP
发明人
UEDA HIROICHI
分类号
H01L21/768
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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