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发明名称
SAMPLE HOLDER OF SPUTTERING FILM FORMING DEVICE
摘要
申请公布号
JPH02175868(A)
申请公布日期
1990.07.09
申请号
JP19880334094
申请日期
1988.12.27
申请人
JAPAN STEEL WORKS LTD:THE
发明人
NODA KOJI;YAMADA TERUO;HASUYAMA HIROKI
分类号
C23C14/46;C23C14/50
主分类号
C23C14/46
代理机构
代理人
主权项
地址
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