发明名称 THIN-FILM COATING APPARATUS
摘要 A thin-film coating apparatus for coating a surface of a substrate with a thin film wherein the creation of void spaces can be prevented on the contacting surfaces between the laminated film and the electrically conductive layer formed on a substrate. The apparatus includes wet rollers which are arranged along the substrate conveyance path prior to a tacking position where the thin-films are temporarily tacked to the substrate. The wet rollers deposit a void preventing agent on the substrate so as to provide a secure lamination. So as to insure that the agent will be supplied to the wet rollers, the apparatus includes supply pipes, flexible dams, means for suppying the agent to the supply pipes and a plurality of holes formed in the supply pipes.
申请公布号 EP0326990(A3) 申请公布日期 1990.07.04
申请号 EP19890101544 申请日期 1989.01.30
申请人 SOMAR CORPORATION 发明人 HAMAMURA, FUMIO
分类号 B65H37/04;B05C1/08;B05C9/04;B29C31/00;B29C65/78;B32B37/22;H05K3/06;(IPC1-7):B29C67/18;G03F7/16;B32B7/00 主分类号 B65H37/04
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