发明名称 |
ELECTRON DETECTOR |
摘要 |
<p>Secondary electrons emitted by a body under electron beam bombardment into the magnetic field of a magnetic electron lens in which the body is placed are constrained and directed by the magnetic field so that the lens either focusses them to a small region at the centre of a hemispherical collector assembly so that the direction of the electrons do not affect their angle of incidence on the collector, or brings their paths to be within a small angle (5 DEG ) of the axis of the lens so that they impinge on a plane collector substantially normally. The invention is of particular value in the electron beam inspection of an integrated circuit when operating.</p> |
申请公布号 |
EP0138610(B1) |
申请公布日期 |
1990.07.04 |
申请号 |
EP19840307068 |
申请日期 |
1984.10.16 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED;TEXAS INSTRUMENTS LIMITED |
发明人 |
GARTH, SIMON CHRISTOPHER JOHN;NIXON, WILLIAM CHARLES |
分类号 |
G01R19/155;G01R19/00;G01R31/28;G01R31/302;G01R31/305;H01J37/244 |
主分类号 |
G01R19/155 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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