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发明名称
METHOD OF FORMING RESIST PATTERN
摘要
申请公布号
JPH02172216(A)
申请公布日期
1990.07.03
申请号
JP19880327185
申请日期
1988.12.24
申请人
SUMITOMO ELECTRIC IND LTD
发明人
FUKUZAWA TAKESHI
分类号
G03F7/11;C23F1/00;H01L21/027
主分类号
G03F7/11
代理机构
代理人
主权项
地址
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