LOWER LAYER FLATTENING MATERIAL,申请号JP19880324985-传众专利搜索

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发明名称	LOWER LAYER FLATTENING MATERIAL
摘要
申请公布号	JPH02171755(A)	申请公布日期	1990.07.03
申请号	JP19880324985	申请日期	1988.12.24
申请人	NIPPON ZEON CO LTD	发明人	KUSANO KENJI;KUSABA HIKARI
分类号	G03F7/11;C08F12/00;C08F12/28;H01L21/027	主分类号	G03F7/11
代理机构		代理人
主权项
地址

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