| 摘要 |
PURPOSE:To always form a laminated thin film under a specified reaction condition by preparing an intermediate pumping room between reaction rooms to prevent the mixture of adjacent reaction room atmospheres. CONSTITUTION:Reaction rooms 1, 2, 3 and an intermediate room 14 are made vacuous with a pumping pipe 6. Since reaction gases are introduced into the reaction rooms 1, 2, 3 through each gas introducing pipe 7, the degree of vacuum of the intermediate room 14 is higher than that of each reaction room. Even if a substrate 10 with a p-layer formed thereupon is moved from the reaction room 1 to the reaction room 2, an atmosphere containing diborane or second products in the room 1 does not move with the substrate or a conveyor 11 into the room 2, because in the spaces between a wall 15 and the conveyor the flow of air exists from the reaction room to the intermediate room, thereby preventing the atmosphere from entering the room 2 from the room 14. Thus, the atmosphere in the room 2 can be maintained at a specified purity. The same is also true for the substrate movement from the reaction room 2 to a reaction room 3, i.e., an atmosphere in the room 3 can be maintained at a specified phosphine concentration. |
