FORMATION OF THIN FILM,申请号JP19880297738-传众专利搜索

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发明名称	FORMATION OF THIN FILM
摘要
申请公布号	JPH02170983(A)	申请公布日期	1990.07.02
申请号	JP19880297738	申请日期	1988.11.25
申请人	TOSHIBA LIGHTING & TECHNOL CORP	发明人	KAWAKATSU AKIRA
分类号	C23C20/08	主分类号	C23C20/08
代理机构		代理人
主权项
地址

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