发明名称 GAZOKEISEIHO
摘要 A process for forming photoresist images by sticking photosensitive layer formed on a film of a polyvinyl alcohol resin which is not soluble in water, but is swellable with water, to a substrate, exposing the photosensitive layer to light through the polyvinyl alcohol resin film, washing away the polyvinyl alcohol resin film with water and developing the photosensitive layer with a developer.
申请公布号 JPH0229207(B2) 申请公布日期 1990.06.28
申请号 JP19820062200 申请日期 1982.04.13
申请人 NIPPON SYNTHETIC CHEM IND 发明人 NAKANO YOSHIO;TOMITA MASAO
分类号 G03F7/26;G03F7/09;G03F7/11;G03F7/16;H05K3/00 主分类号 G03F7/26
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