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经营范围
发明名称
ELECTRON BEAM EXCITATION ION SOURCE
摘要
申请公布号
JPH02168541(A)
申请公布日期
1990.06.28
申请号
JP19880321479
申请日期
1988.12.20
申请人
RIKAGAKU KENKYUSHO
发明人
HARA TAMIO;HAMAGAKI MANABU;AOYANAGI KATSUNOBU;NANBA SUSUMU
分类号
H01J27/20;H01J37/08
主分类号
H01J27/20
代理机构
代理人
主权项
地址
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