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经营范围
发明名称
VACUUM DEVICE
摘要
申请公布号
JPH02166275(A)
申请公布日期
1990.06.26
申请号
JP19880320362
申请日期
1988.12.21
申请人
HITACHI MAXELL LTD
发明人
MIKAMI HIROSUKE;FUJIWARA HIDEO
分类号
C23C14/22;C23C14/24
主分类号
C23C14/22
代理机构
代理人
主权项
地址
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