| 摘要 |
<p>PURPOSE:To enhance capacity by increasing the number of thermocouple groups connected in series through the aperture of an insulating film. CONSTITUTION:An aperture 20 is provided to an insulating film 16 and an ohmic metal film (MF) connecting one end of the thermocouple group of the second layer to the bonding part 18 of the first layer through the MF and the aperture 20 is formed and a thermo-electric metal film 24 connecting the MF of a hot junction 25-1 and a cold junction 25-2 is formed to form the thermocouple group of the second layer connected in series and the insulating film 26 is formed. A group of hot junctions 15-1 and a black point 27 are provided on the film 26 and a silicon layer other than a frame part 11 is removed by etching to form an aperture part 12. Whereupon, the heat of the black point 27 due to the absorption of infrared rays flows from the junctions 15-1, 25-1 to junctions 15-2, 25-2 and sufficient potential difference is also generated between the junctions 15-1, 15-2.</p> |
