CRYSTAL GROWTH OF SEMICONDUCTOR THIN FILM,申请号JP19880321362-传众专利搜索

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发明名称	CRYSTAL GROWTH OF SEMICONDUCTOR THIN FILM
摘要
申请公布号	JPH02165620(A)	申请公布日期	1990.06.26
申请号	JP19880321362	申请日期	1988.12.20
申请人	SEIKO EPSON CORP	发明人	TAKENAKA SATOSHI
分类号	C30B1/02;H01L21/20;H01L21/263;H01L21/336;H01L29/786	主分类号	C30B1/02
代理机构		代理人
主权项
地址

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