MICROWAVE PLASMA ION SOURCE,申请号JP19880317535-传众专利搜索

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发明名称	MICROWAVE PLASMA ION SOURCE
摘要
申请公布号	JPH02162639(A)	申请公布日期	1990.06.22
申请号	JP19880317535	申请日期	1988.12.16
申请人	ANELVA CORP	发明人	NAKAGAWA KOJIN
分类号	H01J27/18;H01J37/08	主分类号	H01J27/18
代理机构		代理人
主权项
地址

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