| 摘要 |
PURPOSE: To obtain a sensor that is rigid and can be hardly affected by temperature shock by connecting a parent material and a film for forming a pressure sensor in a material made of metal that becomes a spacer thermally. CONSTITUTION: A pressure room with ceramic, glass, a circular film 11 that can be elastically deformed of a single crystal material, conductive films 14 and 15 that oppose each other while being thermally bonded to a ring-shaped metal material 20 for forming a spacer, for example, by active soldering for a parent body 12 whose peripheral edge is in circular rigid body is formed. The deformation of the film 11 corresponding to pressure in the pressure room is detected as a capacity change via the films 14 and 15. The connection strength between the film and the parent body is improved as compared with a case when a glass slit is used as a spacer, thus achieving a rigid pressure sensor that can be hardly affected by temperature shock. |
