SAMPLE POSITION SETTING-UP DEVICE IN CHARGED PARTICLE BEAM DEVICE,申请号JP19880311750-传众专利搜索

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发明名称	SAMPLE POSITION SETTING-UP DEVICE IN CHARGED PARTICLE BEAM DEVICE
摘要
申请公布号	JPH02158043(A)	申请公布日期	1990.06.18
申请号	JP19880311750	申请日期	1988.12.09
申请人	JEOL LTD	发明人	KUDOU MASAKUNI
分类号	H01J37/20;H01J37/21;H01J37/248	主分类号	H01J37/20
代理机构		代理人
主权项
地址

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