| 摘要 |
PURPOSE:To efficiently obtain oxynitrided glass having uniform quality by feeding the hydride or halide of Si and nitrogen-contg. gas into a flame and depositing the fine particles of the formed oxynitrided glass on a starting member to form a porous perform, then heating the preform to vitrify the preform to transparent glass. CONSTITUTION:The hydride or halide of Si (e.g.: SiCl4), the nitrogen-contg. gas (e.g.: NH3), oxygen, an inert gas, and hydrogen are introduced into a multitube burner 1 to effect reaction in the flame. The fine particles of the formed oxynitrided glass are deposited on the tip or outer peripheral part of the starting member 3 to form the porous glass preform 2. The porous glass preform 2 is heated to a high temp. and is thereby vitrified to the transparent glass, by which the oxynitrided glass is obtd. The oxynitrided glass-coated optical fiber base material is obtd. by using the glass rod for optical transmission as the starting member 3. |
