摘要 |
<p>PURPOSE:To transport a raw liq. material free of dissolved gas by expanding and contracting a spring metal by the pressure difference in the chemical vapor growth method using a liq. as the raw material. CONSTITUTION:A pressure plate 3 is fixed to the cylinder 2 of a spring metal, and the assembly is set in a closed vessel 1. The airtightness of a raw liq. material storage chamber A is maintained. A liq. inlet pipe 4 and a liq. outlet pipe 5 are provided to the chamber A, and a gas inlet and outlet pipe 6 is furnished to the vessel 1. When the raw material is transported, a valve 8 is opened, a gas is introduced into the vessel 1 from the pipe 6 to press the pressure plate 3, hence the plate 3 is gradually lowered in the vessel 1, and the raw material is forced out into a transport pipe from the outlet pipe 5 and transported. Accordingly, the surface of the raw material is not brought into contact with the pressurized gas, the raw material is transported by the pressure of the gas on the plate 3, and hence the pressurized gas is not dissolved into the raw material.</p> |