MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT,申请号JP19880311152-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号	JPH02156533(A)	申请公布日期	1990.06.15
申请号	JP19880311152	申请日期	1988.12.08
申请人	NEC CORP	发明人	TOMIYAMA TOMOHIKO;ITANI TOSHIRO
分类号	H01L21/31	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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