Pressure sensor with flexible printed circuit.

摘要

A pressure sensor has a pressure responsive capacitor electrically connected to a signal conditioning circuit which is calibrated after mounting in a housing to provide an electrical signal corresponding to an applied pressure. The capacitor has thin metal capacitor plates on facing surfaces of a ceramic diaphragm and base and is adapted to receive an applied pressure on the diaphragm Terminals from the capacitor are disposed on an opposite surface of the capacitor base; the circuit has a flexible substrate having a first end overlying the opposite base surface mounting circuit components electrically connected to the capacitor terminals and has an opposite end folded over the first end electrically connected to connector terminals on a connector body overlying the base; and the housing includes a metal sleeve fitted over the capacitor and body having a rim clamping the capacitor and connector body together to form the sensor. The connector body has a tubular portion open at both ends accessible from outside the body and extending to the flexible circuit to permit circuit calibration through the tubular portion and has an encapsulant therein sealing the body after calibration. Circuit pads capacitively coupled to ground connections at each end of the flexible circuit substrate are providing on substrate tabs which extend between the body and housing rim to be clamped in electrically engagement to each other and to the housing to provide improved electromagnetic compatibility for the sensor.