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发明名称
Method for etching windows having different depths
摘要
申请公布号
US4933297(A)
申请公布日期
1990.06.12
申请号
US19890420788
申请日期
1989.10.12
申请人
AT&T BELL LABORATORIES
发明人
LU, CHIH-YUAN
分类号
H01L21/302;H01L21/28;H01L21/306;H01L21/3065;H01L21/311;H01L21/336;H01L21/768;H01L29/78
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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