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发明名称
MATERIAL EXAMINATION MACHINE WITH SCANNING TYPE ELECTRON MICROSCOPE
摘要
申请公布号
JPH02152152(A)
申请公布日期
1990.06.12
申请号
JP19880306600
申请日期
1988.11.30
申请人
SHIMADZU CORP
发明人
HORIKAWA JUN
分类号
G01N3/00;H01J37/147;H01J37/20;H01J37/22
主分类号
G01N3/00
代理机构
代理人
主权项
地址
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