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发明名称
THIN FILM SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02150067(A)
申请公布日期
1990.06.08
申请号
JP19880304811
申请日期
1988.11.30
申请人
SUMITOMO METAL IND LTD
发明人
KOMAKI KENJI
分类号
H01L27/12;H01L29/40;H01L29/78;H01L29/786
主分类号
H01L27/12
代理机构
代理人
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