FORMATION OF TITANIUM NITRIDE FILM BY DYNAMIC MIXING,申请号JP19880300572-传众专利搜索

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发明名称	FORMATION OF TITANIUM NITRIDE FILM BY DYNAMIC MIXING
摘要
申请公布号	JPH02149663(A)	申请公布日期	1990.06.08
申请号	JP19880300572	申请日期	1988.11.30
申请人	HITACHI LTD	发明人	SADAMURA HIROYOSHI;MAEDA HIROSHI
分类号	C23C14/06;C23C14/22	主分类号	C23C14/06
代理机构		代理人
主权项
地址

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