| 摘要 |
PURPOSE:To increase the length of a capacity of a wire bonding apparatus, vibrating a working head, and to limit a working range by increasing the protruding distance of the capillary from an ultrasonic horn so that the horn does not collide with a substrate during working. CONSTITUTION:A long capillary having two or more resonance nodes is employed as a normally used capillary 3, and attached to an ultrasonic horn 4 having a smaller inertia than that of a stage 2, an easily high speed motion and a short length. The horn 4 is secured to a holding block 5, and the capillary 3 is vertically moved by its rotation in a direction of an arrow A on the pivot 7a of the block 5. The block 5 is rotatably held by the pivot 7a in a housing block 7, and rotated through a spring 6. The block 7 is held in a block 8, and rotatably driven around the shaft of a servo motor 9 attached to the block 8 in a direction of an arrow A by a cam 10. |
