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发明名称
COLLET AND PELLET BONDING APPARATUS USING SAME
摘要
申请公布号
JPH02144929(A)
申请公布日期
1990.06.04
申请号
JP19880298129
申请日期
1988.11.28
申请人
HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD
发明人
SUMIYA OSAMU
分类号
H01L21/52
主分类号
H01L21/52
代理机构
代理人
主权项
地址
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