| 摘要 |
PURPOSE:To make it possible to take action in real time by taking a detection output of the same energy particle out of a detection output at a plurality of slits. CONSTITUTION:An energy difference DELTAE between adjacent slits S1 - S3 changes in proportion to a pass energy Ep of an energy analyzer 1, and there is an equation of DELTAE = kEp (k = a constant). Assuming that a width of energy change for a step in energy scanning is Es, and where Ep is set such that DELTAE = nEs, or Ep = nEs/k, one adjacent detection output before n step and the other adjacent detection output after n step are added with the result that the addition makes a sum of the detection outputs of the same energy particle, and this equation should hold between adjacent slits S1 - S3. Thereby, it is possible to add the detection outputs of charged particles incident on a plurality of detectors D1 - D3 in real time. |
