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发明名称
METHOD OF EXPOSURE OF PHOTORESISTORS
摘要
申请公布号
SU1271295(A1)
申请公布日期
1990.05.30
申请号
SU19843779522
申请日期
1984.08.09
申请人
GENKIN V.N.,SU;MOZZHUKHIN D.D.,SU;SOKOLOV V.V.,SU;SHCHELOKOV A.N.,SU
发明人
GENKIN V.N.,SU;MOZZHUKHIN D.D.,SU;SOKOLOV V.V.,SU;SHCHELOKOV A.N.,SU
分类号
H01L21/312
主分类号
H01L21/312
代理机构
代理人
主权项
地址
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