发明名称 Insulating arrangement for optical insulation of integrated components and the method of manufacture
摘要 An isolating arrangement for isolating a portion of a substrate from the remaining portions of the substrate, characterized by the arrangement comprising a pair of obliquely extending slots which merge with each other in the interior of the substrate to isolate a portion or region of the substrate from the remaining portion, except at least one end of the portion extending between the slots. The slots are preferably formed by a laser-induced, wet-chemical etching and, subsequent to forming the slots, they can be filled with a material, such as metal or a ternary absorber material, to increase the isolation of the substrate region or portion.
申请公布号 US4929515(A) 申请公布日期 1990.05.29
申请号 US19890302480 申请日期 1989.01.27
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 MATZ, RICHARD;ZIRRGIEBEL, JUTTA
分类号 B23K26/18;C30B29/40;G02B6/122;G02B6/13 主分类号 B23K26/18
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