| 摘要 |
PURPOSE:To obtain a thin iron carbide film excellent in magnetic characteristics by forming crystalline iron carbide into a thin film oriented as a columnar structure. CONSTITUTION:A thin film of crystalline iron carbide oriented as a columnar structure. The above-mentioned film is obtained by bringing evaporated metallic iron into contact with a carbon source in a plasma state and depositing the iron carbide on a substrate. The metallic iron can be evaporated by, e.g., placing the metallic iron in a crucible and heating the crucible with an electron gun under 0.1-5.0X10<-3>Torr pressure. A saturated or unsaturated aliphatic hydrocarbon, such as acetylene, ethylene or methane, CO, etc., can be used as the carbon source. In the process, an inert gas, such as Ne, Ar, Kr or Xe, can be used together therewith. A substrate, such as metal or resin, can be used as the substrate. The above-mentioned thin iron carbide film can be used in magnetic layers of magnetic recording media, such as magnetic tape, magnetic hard disk or floppy disk. |
